Micro/Nano Processing Laboratory

Micro/Nano Processing Laboratory

Categories of technology seeds
Nanotechnology・Materials
keyword
Thin-film thermoelectric devicesOptical imaging of magnetic domainsMicrofabricationMEMS(Micro Electro Mechanical Systems)Laser processing

Faculty

溝尻 瑞枝

MIZOSHIRI Mizue

Top Runner Incubation Center for Academia-Industry Fusion

Specially Appointed Associate Professor for Academia-Industry Fusion

TEL:
0258-47-9765
FAX:
0258-47-9765

Specialties

・Production engineering/Processing studies
・Material processing
・Optical engineering and photon science
・Nano/micro-systems

Research areas

・Laser processing
・Micro/nano fabrication
・Microdevices
・Flexible devices

Main facilities

・Femtosecond laser 3D direct writing systems
・Lithography
・RF magnetron sputtering deposition

Forte of this laboratory's study

・3D laser microfabrication for metal/semiconductor/polymer microstructures
・Metal patterning process in air
・Flexible sensor fabrication

Achivements/proposals via industry-academia collabolations

・3D microprinting for metal/semiconductor/polymer microstructures
・Development of micro optical/fluidic devices
・Optical observation for magnetic materials

Areas interesting to interact with

・Development of novel microdevices using 3D microprinting
・Development of microdevices using well-established semiconductor technology
・Optical observation for magnetic materials

  • 3D microprinting for metal/semiconductor/polymer microstructures3D microprinting for metal/semiconductor/polymer microstructures
  • Flexible thin-film thermoelectric generators with microlensesFlexible thin-film thermoelectric generators with microlenses
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